Anelastic properties of aluminium thin films on silicon cantilevers

Ulrich Harms; F.B. Klose; H. Neuhäuser; K. Fricke; Erwin Peiner; A. Schlachetzki

doi:10.1016/s0925-8388(00)01016-1

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Anelastic properties of aluminium thin films on silicon cantilevers

Ulrich Harms F.B. Klose H. Neuhäuser K. Fricke Erwin Peiner A. Schlachetzki

Year: 2000 Journal: Journal of Alloys and Compounds Vol: 310 (1-2)Pages: 449-453 Publisher: Elsevier BV

DOI: 10.1016/s0925-8388(00)01016-1

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Keywords:

Materials science Thin film Silicon Cantilever Aluminium Composite material Modulus Vibration Young's modulus Shear modulus Atmospheric temperature range Amplitude Metallurgy Optics Nanotechnology Acoustics Thermodynamics

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Anelastic properties of aluminium thin films on silicon cantilevers

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