Si-based two-terminal resistive switching nonvolatile memory

Abstract

We present recent studies on amorphous silicon (a-Si) based resistive switching nonvolatile memory devices. The devices exhibit excellent performance of high on/off resistance ratio, high yield, fast speed, long retention/endurance and are fully compatible with CMOS processing. High-density crossbar arrays were successfully demonstrated without degradation of the device performance as compared to single cell level devices.