Polyimide optical waveguides for integrated optical circuits on silicon

Bewsher; Chrostowski; Myslinski; Stern; Syrett

doi:10.1109/ccece.1994.405763

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Polyimide optical waveguides for integrated optical circuits on silicon

Bewsher Chrostowski Myslinski Stern Syrett

Year: 1994 Vol: 10 Pages: 359-362 vol.1

DOI: 10.1109/ccece.1994.405763

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Abstract

This contribution is concerned with addressing various design, materials, and fabrication considerations arising from the production of an extended length, polymeric optical waveguide for use in integrated optical circuits on silicon substrates.< >

Keywords:

Polyimide Silicon Fabrication Waveguide Integrated circuit Materials science Optoelectronics Electronic circuit Silicon photonics Integrated optics Photonic integrated circuit Computer science Nanotechnology Photonics Electrical engineering Engineering Layer (electronics)

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Semiconductor Lasers and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Fiber Optic Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Polyimide optical waveguides for integrated optical circuits on silicon

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