Silicon-on-Nitride Optical Waveguides for Mid- and Near-Infrared Integrated Photonics

Saeed Khan; Jeff Chiles; Jichi Ma; Sasan Fathpour

doi:10.1364/cleo_si.2013.cth4f.4

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JOURNAL ARTICLE

Silicon-on-Nitride Optical Waveguides for Mid- and Near-Infrared Integrated Photonics

Saeed Khan Jeff Chiles Jichi Ma Sasan Fathpour

Year: 2013 Vol: 12 Pages: CTh4F.4-CTh4F.4

DOI: 10.1364/cleo_si.2013.cth4f.4

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Abstract

Silicon-on-nitride waveguides are demonstrated at mid- and near-infrared wavelengths. The fabrication is based on bonding silicon to silicon-on-insulator dies coated with low-stress silicon nitride. At 3.39 pm wavelength, the measured propagation loss is ~5 dB/cm.

Keywords:

Silicon nitride Materials science Silicon on insulator Optoelectronics Silicon Fabrication Silicon photonics Hybrid silicon laser Wavelength Photonics Nitride Infrared Near-infrared spectroscopy Optics Nanotechnology Physics

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Fiber Laser Technologies

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Silicon-on-Nitride Optical Waveguides for Mid- and Near-Infrared Integrated Photonics

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