Topographical evolution of sputtered chromium nitride thin films

JOURNAL ARTICLE

Year: 2006 Journal: Thin Solid Films Vol: 515 (5)Pages: 2903-2920 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2006.08.031

Keywords:

Thin film Chromium nitride Chromium Nitride Materials science Metallurgy Sputtering Nanotechnology Layer (electronics)

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