Patterned low temperature copper-rich deposits using inkjet printing

Abstract

A PZT piezoelectric ceramic research drop-on-demand inkjet print head operating in bend mode was used as a means of delivering a copper precursor, vinyltrimethylsilane copper (+1) hexafluoroacetylacetonate, in a controlled and placement accurate fashion. The reagent disproportionates at low temperature (<200 °C), to deposit copper on glass. These deposits are shown to be more than 90% copper by weight by electron probe microanalysis and microbeam Rutherford backscattering spectroscopy. Microscopy shows a deposit diameter and three-dimensional profile that suggests a complex deposition and conversion mechanism. Our findings represent an important step towards the manufacture of electronic devices by entirely nonlithographic means.