Chemical vapor deposition of TiWC thin films

JOURNAL ARTICLE

Year: 2001 Journal: Surface and Coatings Technology Vol: 148 (2-3)Pages: 262-267 Publisher: Elsevier BV

DOI: 10.1016/s0257-8972(01)01342-1

Keywords:

Materials science Thin film Chemical vapor deposition Combustion chemical vapor deposition Chemical engineering Metallurgy Nanotechnology Carbon film

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced materials and composites

Physical Sciences → Engineering → Mechanical Engineering