Fabrication Process of Nonarcing Power MEMS Switch

Abstract

We proposed a new electric contact device that suppresses the arc phenomena. The functions of electric contacts are divided into energizing and switching for arc suppression. Switching contacts consist of multielectrodes and each electrode current is suppressed by the series resistance. For realization of multicontacting, cantilever beam array electrodes were formed on a silicon substrate using micro-electtomechanical systems (MEMS) technology. The finite element method was used to optimize the structure. The fabrication process of the cantilever was examined. Au-Au contact current of 0.97 A was broken without arc ignition.