Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist

Jun Akedo; Jae-Hyuk Park; Hiroki Tsuda

doi:10.1007/s10832-007-9385-y

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JOURNAL ARTICLE

Fine patterning of ceramic thick layer on aerosol deposition by lift-off process using photoresist

Jun Akedo Jae-Hyuk Park Hiroki Tsuda

Year: 2007 Journal: Journal of Electroceramics Vol: 22 (1-3)Pages: 319-326 Publisher: Springer Science+Business Media

DOI: 10.1007/s10832-007-9385-y

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Keywords:

Photoresist Materials science Layer (electronics) Ceramic Deposition (geology) Lift (data mining) Composite material Substrate (aquarium) Aerosol Optoelectronics Nanotechnology Meteorology

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Topics

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

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