JOURNAL ARTICLE

Micromachined sensor structures with linear capacitive response

Lars RosengrenJan SöderkvistL. Smith

Year: 1992 Journal:   Sensors and Actuators A Physical Vol: 31 (1-3)Pages: 200-205   Publisher: Elsevier BV
Keywords:
Capacitive sensing Linearity Finite element method Capacitance Materials science Bar (unit) Membrane Pressure sensor Nonlinear system Work (physics) Acoustics Electronic engineering Optoelectronics Mechanical engineering Engineering Structural engineering Electrical engineering Electrode Chemistry Physics

Metrics

42
Cited By
0.89
FWCI (Field Weighted Citation Impact)
5
Refs
0.73
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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