Micromachined sensor structures with linear capacitive response

Lars Rosengren; Jan Söderkvist; L. Smith

doi:10.1016/0924-4247(92)80104-b

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Micromachined sensor structures with linear capacitive response

Lars Rosengren Jan Söderkvist L. Smith

Year: 1992 Journal: Sensors and Actuators A Physical Vol: 31 (1-3)Pages: 200-205 Publisher: Elsevier BV

DOI: 10.1016/0924-4247(92)80104-b

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Keywords:

Capacitive sensing Linearity Finite element method Capacitance Materials science Bar (unit) Membrane Pressure sensor Nonlinear system Work (physics) Acoustics Electronic engineering Optoelectronics Mechanical engineering Engineering Structural engineering Electrical engineering Electrode Chemistry Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Micromachined sensor structures with linear capacitive response

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