Preparation and piezoresistive properties of reactively sputtered indium tin oxide thin films

S.E. Dyer; Otto J. Gregory; Paul S. Amons; Arnout Bruins Slot

doi:10.1016/s0040-6090(96)08865-7

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Preparation and piezoresistive properties of reactively sputtered indium tin oxide thin films

S.E. Dyer Otto J. Gregory Paul S. Amons Arnout Bruins Slot

Year: 1996 Journal: Thin Solid Films Vol: 288 (1-2)Pages: 279-286 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(96)08865-7

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Keywords:

Piezoresistive effect Materials science Indium tin oxide Annealing (glass) Thin film Indium Sputtering Gauge factor Temperature coefficient Band gap Analytical Chemistry (journal) Oxide Composite material Optoelectronics Nanotechnology Metallurgy Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Preparation and piezoresistive properties of reactively sputtered indium tin oxide thin films

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