Tunable MEMS cantilever resonators electrothermally actuated and piezoelectrically sensed

Boris Sviličić; Enrico Mastropaolo; Rui Zhang; Rebecca Cheung

doi:10.1016/j.mee.2015.02.049

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Tunable MEMS cantilever resonators electrothermally actuated and piezoelectrically sensed

Boris Sviličić Enrico Mastropaolo Rui Zhang Rebecca Cheung

Year: 2015 Journal: Microelectronic Engineering Vol: 145 Pages: 38-42 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2015.02.049

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Keywords:

Cantilever Materials science Resonator Microelectromechanical systems Optoelectronics Piezoelectricity Voltage Stress (linguistics) Actuator Biasing Port (circuit theory) Beam (structure) Acoustics Optics Electrical engineering Composite material Physics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Tunable MEMS cantilever resonators electrothermally actuated and piezoelectrically sensed

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