MEMS whistle-type temperature-compensated displacement sensor using resonant frequency shift

Tadashi Ishida; Van Nguyen Quet; Shota Mochizuki; Yusuke Kagawa; Toshio Takayama; Toru Omata

doi:10.1016/j.sna.2014.11.007

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MEMS whistle-type temperature-compensated displacement sensor using resonant frequency shift

Tadashi Ishida Van Nguyen Quet Shota Mochizuki Yusuke Kagawa Toshio Takayama Toru Omata

Year: 2014 Journal: Sensors and Actuators A Physical Vol: 222 Pages: 24-30 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2014.11.007

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Keywords:

Microelectromechanical systems Displacement (psychology) Miniaturization Acoustics Materials science Electronic engineering Electrical engineering Engineering Optoelectronics Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Microfluidic and Bio-sensing Technologies

Physical Sciences → Engineering → Biomedical Engineering

Flow Measurement and Analysis

Physical Sciences → Engineering → Mechanics of Materials

MEMS whistle-type temperature-compensated displacement sensor using resonant frequency shift

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