JOURNAL ARTICLE

Epitaxial growth of high-temperature superconducting thin films

J. N. EcksteinDarrell G. SchlomE. S. HellmanK. E. von DessonneckZ. J. ChenChris WebbFrancis J. TurnerJ. S. HarrisM. R. BeasleyT. H. Geballe

Year: 1989 Journal:   Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Vol: 7 (2)Pages: 319-323   Publisher: AIP Publishing

Abstract

We report the development of molecular-beam epitaxy (MBE) techniques for the growth of high-temperature, perovskite-like superconductors. The use of a plasma source of active oxygen allows the in situ growth of such layers. Some of the films grown this way were superconducting as grown. Smooth films exhibiting streaked reflection high-energy electron diffraction (RHEED) patterns, were obtained by using shuttering to kinetically control the growth process. We also report initial results of experiments in which kinetic control is used to layer metastable, nonequilibrium structures in the bismuthstrontium–calcium–copper–oxide system.

Keywords:
Reflection high-energy electron diffraction Molecular beam epitaxy Electron diffraction Epitaxy Superconductivity Materials science Metastability Thin film Reflection (computer programming) Optoelectronics Diffraction Condensed matter physics Layer (electronics) Chemistry Nanotechnology Optics Physics

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33
Cited By
9.37
FWCI (Field Weighted Citation Impact)
0
Refs
0.99
Citation Normalized Percentile
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Citation History

Topics

Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
Physics of Superconductivity and Magnetism
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Advanced Condensed Matter Physics
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
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