Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

Minna Nieminen; Matti Putkonen; Lauri Niinistö

doi:10.1016/s0169-4332(01)00149-0

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Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

Minna Nieminen Matti Putkonen Lauri Niinistö

Year: 2001 Journal: Applied Surface Science Vol: 174 (2)Pages: 155-166 Publisher: Elsevier BV

DOI: 10.1016/s0169-4332(01)00149-0

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Keywords:

Materials science Crystallinity Thin film Lanthanum oxide Amorphous solid Monoclinic crystal system Oxide Chemical engineering Analytical Chemistry (journal) Mineralogy Crystallography Nanotechnology Chemistry Metallurgy Crystal structure Composite material

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Formation and stability of lanthanum oxide thin films deposited from β-diketonate precursor

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