CO2 gas sensor based on silicon nanowires modified with metal nanoparticles

Sabrina Naama; Toufik Hadjersi; A. Keffous; G. Nezzal

doi:10.1016/j.mssp.2015.01.027

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CO2 gas sensor based on silicon nanowires modified with metal nanoparticles

Sabrina Naama Toufik Hadjersi A. Keffous G. Nezzal

Year: 2015 Journal: Materials Science in Semiconductor Processing Vol: 38 Pages: 367-372 Publisher: Elsevier BV

DOI: 10.1016/j.mssp.2015.01.027

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Keywords:

Materials science Scanning electron microscope Aqueous solution Etching (microfabrication) Metal Nanotechnology Nanoparticle Silicon Nanowire Isotropic etching Chemical engineering Silicon nanowires Platinum Analytical Chemistry (journal) Optoelectronics Metallurgy Composite material Catalysis Physical chemistry Organic chemistry

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Topics

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

CO2 gas sensor based on silicon nanowires modified with metal nanoparticles

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