Ion beam alignment for liquid crystal display fabrication

J. P. Doyle; P. Chaudhari; J. Lacey; E. Galligan; S.-C. A. Lien; Alesandro Callegari; N. D. Lang; Minhua Lu; Y. Nakagawa; Hiroki Nakano; Noriaki Okazaki; S. Odahara; Yoshimine Katoh; Yukito Saitoh; Kazumi Sakai; Hiromasa Satoh; Yasuhiko Shiota

doi:10.1016/s0168-583x(03)00796-1

JOURNAL ARTICLE

Ion beam alignment for liquid crystal display fabrication

J. P. Doyle P. Chaudhari J. Lacey E. Galligan S.-C. A. Lien Alesandro Callegari N. D. Lang Minhua Lu Y. Nakagawa Hiroki Nakano Noriaki Okazaki S. Odahara Yoshimine Katoh Yukito Saitoh Kazumi Sakai Hiromasa Satoh Yasuhiko Shiota

Year: 2003 Journal: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms Vol: 206 Pages: 467-471 Publisher: Elsevier BV

DOI: 10.1016/s0168-583x(03)00796-1

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Keywords:

Rubbing Materials science Liquid-crystal display Fabrication Polyimide Ion beam Substrate (aquarium) Deposition (geology) Layer (electronics) Liquid crystal Process (computing) Composite material Optoelectronics Nanotechnology Beam (structure) Optics Computer science

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Liquid Crystal Research Advancements

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion beam alignment for liquid crystal display fabrication

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