JOURNAL ARTICLE

Review of Silicon Photonics Foundry Efforts

Andy Eu-Jin LimJunfeng SongQing FangChao LiXiaoguang TuNing DuanKok Kiong ChenRoger Poh-Cher TernTsung-Yang Liow

Year: 2014 Journal:   IEEE Journal of Selected Topics in Quantum Electronics Vol: 20 (4)Pages: 405-416   Publisher: IEEE Photonics Society

Abstract

Silicon photonics have progressed to a point where the next step for commercialization depends on the accessibility of manufacturing foundries. The implementation of a fabless foundry model using standardized process technology platforms is crucial for that to occur. Research and development (R&D) foundries are beginning to play bigger roles in transforming silicon photonics into a mature technology for mass production. R&D foundry services such as multi-project wafer (MPW) shuttles, customized process developmental runs and small volume manufacturing are discussed. The development of commercial foundries for low cost, high volume production is also shown to be underway, and key results from an on-going effort to set-up a manufacturing silicon photonics foundry line are presented.

Keywords:
Foundry Commercialization Silicon photonics Photonics Manufacturing engineering Wafer Silicon Engineering Computer science Mechanical engineering Electrical engineering Materials science Business Optoelectronics

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379
Cited By
19.47
FWCI (Field Weighted Citation Impact)
31
Refs
1.00
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Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Semiconductor Lasers and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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