JOURNAL ARTICLE

Micromachined thick film piezoelectric ultrasonic transducer array

Zhihong WangWeiguang ZhuJianmin MiaoHong ZhuChen ChaoOoi Kiang Tan

Year: 2005 Journal:   Sensors and Actuators A Physical Vol: 130-131 Pages: 485-490   Publisher: Elsevier BV
Keywords:
Materials science Transducer Piezoelectricity Wafer Surface micromachining Ultrasonic sensor Capacitive micromachined ultrasonic transducers PMUT Acoustics Optoelectronics Composite material Fabrication

Metrics

72
Cited By
1.60
FWCI (Field Weighted Citation Impact)
20
Refs
0.81
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Ultrasound Imaging and Elastography
Health Sciences →  Medicine →  Radiology, Nuclear Medicine and Imaging
Ultrasonics and Acoustic Wave Propagation
Physical Sciences →  Engineering →  Mechanics of Materials
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
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