Micromachined thick film piezoelectric ultrasonic transducer array

Zhihong Wang; Weiguang Zhu; Jianmin Miao; Hong Zhu; Chen Chao; Ooi Kiang Tan

doi:10.1016/j.sna.2005.10.054

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Micromachined thick film piezoelectric ultrasonic transducer array

Zhihong Wang Weiguang Zhu Jianmin Miao Hong Zhu Chen Chao Ooi Kiang Tan

Year: 2005 Journal: Sensors and Actuators A Physical Vol: 130-131 Pages: 485-490 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2005.10.054

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Keywords:

Materials science Transducer Piezoelectricity Wafer Surface micromachining Ultrasonic sensor Capacitive micromachined ultrasonic transducers PMUT Acoustics Optoelectronics Composite material Fabrication

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Ultrasound Imaging and Elastography

Health Sciences → Medicine → Radiology, Nuclear Medicine and Imaging

Ultrasonics and Acoustic Wave Propagation

Physical Sciences → Engineering → Mechanics of Materials

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Micromachined thick film piezoelectric ultrasonic transducer array

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