Fabrication of Si/SiO2 nanocomposite thin films

I.T.H. Chang; B. Cantor; P. A. Leigh; P.J. Dobson

doi:10.1016/0965-9773(95)00189-1

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Fabrication of Si/SiO2 nanocomposite thin films

I.T.H. Chang B. Cantor P. A. Leigh P.J. Dobson

Year: 1995 Journal: Nanostructured Materials Vol: 6 (5-8)Pages: 835-838 Publisher: Elsevier BV

DOI: 10.1016/0965-9773(95)00189-1

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Keywords:

Materials science Amorphous solid Nanocomposite Annealing (glass) Sputtering Thin film Transmission electron microscopy Stoichiometry Fourier transform infrared spectroscopy Microstructure Analytical Chemistry (journal) Fabrication High-resolution transmission electron microscopy Chemical engineering Nanotechnology Composite material Crystallography Chemistry Physical chemistry

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Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Fabrication of Si/SiO2 nanocomposite thin films

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