JOURNAL ARTICLE
Fabrication of passive micromixer using a digital micromirror device-based maskless lithography system
Yong-Kyu ChoTaeheon HanSeok-Jae HaJungwon LeeJongsu KimSun Min KimMyeong‐Woo Cho
Year: 2014 Journal: International Journal of Precision Engineering and Manufacturing Vol: 15 (7)Pages: 1417-1422 Publisher: Springer Science+Business Media
Keywords:
Micromixer Digital micromirror device Maskless lithography Materials science Lithography Fabrication Optics Optoelectronics Digital Light Processing Microfluidics Photolithography Nanotechnology Electron-beam lithography Physics Resist
Metrics
5
Cited By
0.56
FWCI (Field Weighted Citation Impact)
14
Refs
0.67
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Microfluidic and Capillary Electrophoresis Applications
Physical Sciences → Engineering → Biomedical Engineering
Innovative Microfluidic and Catalytic Techniques Innovation
Physical Sciences → Engineering → Biomedical Engineering
Electrowetting and Microfluidic Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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