In-Situ Deposition of C-Axis Oriented Barium Ferrite Films for Microwave Applications

Abstract

We report the deposition of M-type films by the alternating target laser ablation deposition using Fe ₂ O ₃ and BaFe ₄ O ₇ targets to simulate the unit cell of BaFe ₁₂ O ₁₉ rather than a previous used tridymite structure, such as BaFe ₂ O ₄ for R-block. In fact, the natural composition of the R-block is easier to be simulated by BaFe ₄ O ₇ . This target provides a flexible control over magnetic properties of the deposited films. Magnetic, electrical, and structural properties were measured using both types of targets in simulating barium ferrite. The films are consistent with bulk properties of barium ferrite. However, the use of BaFe ₄ O ₇ targets improved resistivity of the films.