JOURNAL ARTICLE
Dual Wavelength Femtosecond Laser Materials Processing
Masanao KamataSusumu TsujikawaTetusmi SumiyoshiHitoshi Sekita
Year: 2007 Journal: 2007 Conference on Lasers and Electro-Optics (CLEO) Vol: 80 Pages: 1-2
Abstract
Femtosecond laser ablation using the combination of 260 nm pulses and 780 nm pulses is explored for the high speed and high quality selected removal of insulating layers.
Keywords:
Femtosecond Materials science Laser Laser ablation Optoelectronics Wavelength X-ray laser Optics Ablation Ultrafast optics Materials processing Laser power scaling Physics Engineering
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Citation History
Topics
Laser Material Processing Techniques
Physical Sciences → Engineering → Computational Mechanics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
Laser-induced spectroscopy and plasma
Physical Sciences → Engineering → Mechanics of Materials
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