Photonic Crystal Templates Obtained by Two-Photon Laser Lithography in Photoresist SU-8

Vygantas Mizeikis; Kock Khuen Seet; Saulius Juodkazis; Vygandas Jarutis; Hiroaki Misawa

doi:10.1557/proc-850-mm4.6

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Photonic Crystal Templates Obtained by Two-Photon Laser Lithography in Photoresist SU-8

Vygantas Mizeikis Kock Khuen Seet Saulius Juodkazis Vygandas Jarutis Hiroaki Misawa

Year: 2004 Journal: MRS Proceedings Vol: 850 Publisher: Cambridge University Press

DOI: 10.1557/proc-850-mm4.6

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Keywords:

Materials science Photoresist Template Photonic crystal Optoelectronics Lithography Photonics Maskless lithography Femtosecond Laser Photonic metamaterial Optics Resist Nanotechnology Electron-beam lithography Layer (electronics)

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Photonic Crystal Templates Obtained by Two-Photon Laser Lithography in Photoresist SU-8

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