A novel structure of a variable optical attenuator is proposed. It is composed of planar waveguides as optical media and a micro-electro-mechanical system (MEMS) comb actuator with a light blocking bar as the light attenuator. The core of the planar optical waveguide is gradually expanded such that single-mode operation is maintained. The results of the analyses of the optical properties of a planar waveguide MEMS optical attenuator by an optical simulation–beam propagation method (BPM) are presented. The insertion loss, polarization-dependent loss, and wavelength-dependent loss of this attenuator are analyzed. The optimized design parameters for an expanded-core waveguide are determined through the BPM with consideration of optical losses.
David W. NippaSteven M. RisserMelissa DixonRichard HigginsDirk SchoellnerLouis Eugene Vassy
David W. NippaRichard W. RidgwaySteven M. RisserVincent D. McGinniss
Min‐Cheol OhSu-Hong ChoYoung-Ouk NohHyung-Jong LeeJung-Jin JooMyung‐Hyun Lee
Takuya MiuraFumio KoyamaAkihiro Matsutani