JOURNAL ARTICLE

<title>Berkeley EUV spectrometer microchannel plate detectors for ORFEUS</title>

Joseph M. StockOswald H. W. SiegmundMark HurwitzRichard RaffantiC. Stuart BowyerM. Lampton

Year: 1993 Journal:   Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Vol: 2006 Pages: 128-138   Publisher: SPIE

Abstract

We have developed detectors design for high resolution spectroscopic imaging for the EUV spectrometer on the ORFEUS-SPAS mission. The detectors employ spherically curved microchannel plates and a delay line read out system. We present results from the testing and calibration of the detectors prior to their integration into the spectrometer. The design, MCP preconditioning, and imaging characteristics are discussed for 2 rectangular spectral detectors and for the fine guidance detector. Each spectral detector achieves a 30 X 100 micrometers FWHM resolution element size over a 95 mm X 25 mm anode format with good linearity (< 30 micrometers ) in the spectral direction. The fine guidance detector, used for drift corrections, achieves good resolution and will meet the necessary centroiding requirements.

Keywords:
Spectrometer Microchannel plate detector Extreme ultraviolet lithography Detector Physics Optics

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Citation History

Topics

Photocathodes and Microchannel Plates
Physical Sciences →  Engineering →  Biomedical Engineering
Electron and X-Ray Spectroscopy Techniques
Physical Sciences →  Materials Science →  Surfaces, Coatings and Films
X-ray Spectroscopy and Fluorescence Analysis
Physical Sciences →  Physics and Astronomy →  Radiation

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