Nanostructured porous silicon by laser assisted electrochemical etching

Jun Li; Cheng Lü; X. K. Hu; Xiujuan Yang; А. В. Лобода; R. H. Lipson

doi:10.1016/j.ijms.2009.05.007

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Nanostructured porous silicon by laser assisted electrochemical etching

Jun Li Cheng Lü X. K. Hu Xiujuan Yang А. В. Лобода R. H. Lipson

Year: 2009 Journal: International Journal of Mass Spectrometry Vol: 285 (3)Pages: 137-142 Publisher: Elsevier BV

DOI: 10.1016/j.ijms.2009.05.007

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Keywords:

Etching (microfabrication) Chemistry Silicon Porous silicon Laser Analytical Chemistry (journal) Matrix-assisted laser desorption electrospray ionization Raman spectroscopy Irradiation Desorption Reactive-ion etching Mass spectrometry Optoelectronics Matrix-assisted laser desorption/ionization Materials science Optics Chromatography Organic chemistry

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Mass Spectrometry Techniques and Applications

Physical Sciences → Chemistry → Spectroscopy

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Analytical chemistry methods development

Physical Sciences → Chemistry → Analytical Chemistry

Nanostructured porous silicon by laser assisted electrochemical etching

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