Laser beam shaping system for semiconductor processing

Toshiyuki Sameshima; S. Usui

doi:10.1016/0030-4018(92)90309-f

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Laser beam shaping system for semiconductor processing

Toshiyuki Sameshima S. Usui

Year: 1992 Journal: Optics Communications Vol: 88 (1)Pages: 59-62 Publisher: Elsevier BV

DOI: 10.1016/0030-4018(92)90309-f

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Keywords:

Optics Collimated light Beam (structure) Laser beam quality Beam expander Laser Materials science Laser beams Beam parameter product M squared Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-Matter Interactions and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

Laser beam shaping system for semiconductor processing

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