JOURNAL ARTICLE

Laser beam shaping system for semiconductor processing

Toshiyuki SameshimaS. Usui

Year: 1992 Journal:   Optics Communications Vol: 88 (1)Pages: 59-62   Publisher: Elsevier BV
Keywords:
Optics Collimated light Beam (structure) Laser beam quality Beam expander Laser Materials science Laser beams Beam parameter product M squared Physics

Metrics

4
Cited By
0.98
FWCI (Field Weighted Citation Impact)
13
Refs
0.73
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Laser-Matter Interactions and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Phase-change materials and chalcogenides
Physical Sciences →  Materials Science →  Materials Chemistry

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