JOURNAL ARTICLE

Use of wafer maps in integrated circuit manufacturing

Christian K. HansenP. Thyregod

Year: 1998 Journal:   Microelectronics Reliability Vol: 38 (6-8)Pages: 1155-1164   Publisher: Elsevier BV
Keywords:
Wafer Integrated circuit Fault (geology) Wafer testing Computer science Process (computing) Quality (philosophy) Reliability engineering Measure (data warehouse) Electronic engineering Data mining Engineering Electrical engineering Geology Physics

Metrics

31
Cited By
1.21
FWCI (Field Weighted Citation Impact)
19
Refs
0.76
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Industrial Vision Systems and Defect Detection
Physical Sciences →  Engineering →  Industrial and Manufacturing Engineering
Soil Geostatistics and Mapping
Physical Sciences →  Environmental Science →  Environmental Engineering
Optimal Experimental Design Methods
Social Sciences →  Decision Sciences →  Management Science and Operations Research

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