Use of wafer maps in integrated circuit manufacturing

Christian K. Hansen; P. Thyregod

doi:10.1016/s0026-2714(98)00127-9

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JOURNAL ARTICLE

Use of wafer maps in integrated circuit manufacturing

Christian K. Hansen P. Thyregod

Year: 1998 Journal: Microelectronics Reliability Vol: 38 (6-8)Pages: 1155-1164 Publisher: Elsevier BV

DOI: 10.1016/s0026-2714(98)00127-9

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Keywords:

Wafer Integrated circuit Fault (geology) Wafer testing Computer science Process (computing) Quality (philosophy) Reliability engineering Measure (data warehouse) Electronic engineering Data mining Engineering Electrical engineering Geology Physics

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Industrial Vision Systems and Defect Detection

Physical Sciences → Engineering → Industrial and Manufacturing Engineering

Soil Geostatistics and Mapping

Physical Sciences → Environmental Science → Environmental Engineering

Optimal Experimental Design Methods

Social Sciences → Decision Sciences → Management Science and Operations Research

Use of wafer maps in integrated circuit manufacturing

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