A new lossless image compression algorithm is presented, aimed at mask less lithography systems with mostly right-angled regular structures. Since these images appear often in slightly rotated form, an algorithm dealing with this special case is suggested, which improves performance relative to the state of the art alternatives.
Shmuel T. KleinDana ShapiraGal Shelef
Chin-Khai TangMing-Shing SuYi-Chang Lu