JOURNAL ARTICLE

Lossless Compression of Rotated Maskless Lithography Images

Abstract

A new lossless image compression algorithm is presented, aimed at mask less lithography systems with mostly right-angled regular structures. Since these images appear often in slightly rotated form, an algorithm dealing with this special case is suggested, which improves performance relative to the state of the art alternatives.

Keywords:
Lossless compression Lithography Computer science Computer vision Compression (physics) Artificial intelligence Image compression Data compression Image (mathematics) Optics Materials science Image processing Physics

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Topics

Advanced Data Compression Techniques
Physical Sciences →  Computer Science →  Computer Vision and Pattern Recognition
Computer Graphics and Visualization Techniques
Physical Sciences →  Computer Science →  Computer Graphics and Computer-Aided Design
Video Coding and Compression Technologies
Physical Sciences →  Computer Science →  Signal Processing

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