JOURNAL ARTICLE

Interferometric Quantum Sensors

Abstract

Optical interferometric sensors represent the most advanced measurement tools in terms of precision and sensitivity for position detection. Micro-mechanical and micro-optical active and passive devices can be realized with present technologies on integrable substrates such as silicon wafers. We are working on the fabrication and characterization of micromirrors realized with micromachining technique. Our goal is to realize structures with a mechanical resonance frequency in ranges 1 kHz – 100 kHz and 1 MHz – 100 MHz. In these ranges we can think of different applications above all in the detection of gravitational waves and in quantum computation.

Keywords:
Wafer Interferometry Materials science Fabrication Surface micromachining Sensitivity (control systems) Optoelectronics Characterization (materials science) Silicon Integrable system Optics Position (finance) Electronic engineering Nanotechnology Physics Engineering

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Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Fiber Optic Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Geophysics and Sensor Technology
Physical Sciences →  Engineering →  Ocean Engineering

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