Semiempirical calculations of fluorine chemisorption on the Si(111)7*7 surface

JOURNAL ARTICLE

Year: 1995 Journal: Journal of Physics Condensed Matter Vol: 7 (36)Pages: 7113-7123 Publisher: IOP Publishing

DOI: 10.1088/0953-8984/7/36/002

Abstract

The chemisorption and etching of fluorine on the Si(111)7*7 surface has been studied using Si90H74Fn (1

Keywords:

Fluorine Chemisorption Dangling bond Chemistry Atom (system on chip) Delocalized electron Adsorption Atomic physics Silicon Physical chemistry

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