JOURNAL ARTICLE

DC sputter deposition of amorphous indium–gallium–zinc–oxide (a-IGZO) films with H2O introduction

Keywords:
Amorphous solid Gallium Sputtering Materials science Sputter deposition Indium Zinc Analytical Chemistry (journal) Electrical resistivity and conductivity Deposition (geology) Cavity magnetron Thin film Optoelectronics Inorganic chemistry Nanotechnology Chemistry Metallurgy Electrical engineering Crystallography

Metrics

49
Cited By
2.92
FWCI (Field Weighted Citation Impact)
12
Refs
0.92
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

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Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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Physical Sciences →  Materials Science →  Materials Chemistry
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Physical Sciences →  Materials Science →  Polymers and Plastics
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