JOURNAL ARTICLE
Optical properties of ZnO thin films deposited by dc reactive magnetron sputtering
Lijian MengM. AndritschkyM.P. dos Santos
Year: 1993 Journal: Vacuum Vol: 44 (2)Pages: 105-109 Publisher: Elsevier BV
Keywords:
Materials science Thin film Sputtering Zinc Substrate (aquarium) Sputter deposition Refractive index Cavity magnetron Partial pressure Deposition (geology) Crystal (programming language) Optoelectronics Metal Oxygen Analytical Chemistry (journal) Metallurgy Chemistry Nanotechnology
Metrics
21
Cited By
2.33
FWCI (Field Weighted Citation Impact)
11
Refs
0.88
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
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