Fabrication of Ultrathin Free-Standing Ceramic Chips Based on Printing Technology

Abstract

In order to obtain high quality ultrathin free-standing ceramic chips, a new manufacturing process based on the screen printing and the cold isostatic pressing process has been developed. 1) In this process, an ultrathin free-standing green sheet (less than 20 μm thick) can be achieved successfully as shown in Fig. 1. After sintering, an ultrathin free-standing ceramic chip (less than 20 μm thick) with good density uniformity, can be obtained as shown in Fig. 2. In addition, the thicknesses of the ultrathin chips can be adjusted by changing the printing parameters for different application requirements. Such process can significantly widen the scope and applicability of the ultrathin chips in many kinds of materials.