Deposition of Aluminum-Doped Zinc Oxide Thin Films by Spray Pyrolysis

Abstract

Aluminum-doped zinc oxide films were prepared on Corning 7059 by an inexpensive spray pyrolysis technique. Variation in structural, electrical and optical properties with doping concentration is investigated in detail. The films were highly transparent to the visible radiation and electrically conductive. X-ray diffraction results show that all films were polycrystalline in nature with [002] preferred orientation. Texture coefficient and grain size were calculated along the [002] direction for all films with different doping concentrations. Carrier concentration and mobility values were determined by measuring the Hall voltage at room temperature. Good correlation between structural and electrical properties was found.