JOURNAL ARTICLE
QUANTITATIVE X-RAY ENERGY DISPERSIVE ANALYSIS OF THIN FOILS
Year: 1984 Journal: Le Journal de Physique Colloques Vol: 45 (C2)Pages: C2-401 Publisher: EDP Sciences
Abstract
A procedure for making quantitative X-ray analysis of thin foils in scanning transmission electron microscopes (STEM) is described. The technique predicts correction parameters based on the thickness of the foil, the specimen geometry and electron microscope instrumental variables. It is shown that absorption can play an important role in nickel based alloy specimens even at foil thicknesses of around 1000 A.
Keywords:
FOIL method Scanning transmission electron microscopy Materials science Scanning electron microscope Optics Absorption (acoustics) Transmission electron microscopy X-ray Microscope Alloy Electron microscope Nickel Thin film Composite material Metallurgy Nanotechnology Physics
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Topics
Electron and X-Ray Spectroscopy Techniques
Physical Sciences → Materials Science → Surfaces, Coatings and Films
Nuclear Physics and Applications
Physical Sciences → Physics and Astronomy → Radiation
Advanced Materials Characterization Techniques
Physical Sciences → Engineering → Biomedical Engineering
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