Properties of (Nb1 − xTax)2O5 solid solutions and (Nb1 − xTax)2O5-ZrO2 nanolaminates grown by Atomic Layer Epitaxy

Kaupo Kukli; Mikko Ritala; Markku Leskelä

doi:10.1016/s0965-9773(98)00003-8

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Properties of (Nb1 − xTax)2O5 solid solutions and (Nb1 − xTax)2O5-ZrO2 nanolaminates grown by Atomic Layer Epitaxy

Kaupo Kukli Mikko Ritala Markku Leskelä

Year: 1997 Journal: Nanostructured Materials Vol: 8 (7)Pages: 785-793 Publisher: Elsevier BV

DOI: 10.1016/s0965-9773(98)00003-8

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Keywords:

Materials science Amorphous solid Crystallite Tetragonal crystal system Epitaxy Layer (electronics) Crystallography Inorganic chemistry Nanotechnology Crystal structure Chemistry Metallurgy

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Properties of (Nb1 − xTax)2O5 solid solutions and (Nb1 − xTax)2O5-ZrO2 nanolaminates grown by Atomic Layer Epitaxy

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