Properties of aluminum doped zinc oxide materials and sputtering thin films

Chung Ping Liu; Gwo Rou Jeng

doi:10.1016/j.jallcom.2008.01.053

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Properties of aluminum doped zinc oxide materials and sputtering thin films

Chung Ping Liu Gwo Rou Jeng

Year: 2008 Journal: Journal of Alloys and Compounds Vol: 468 (1-2)Pages: 343-349 Publisher: Elsevier BV

DOI: 10.1016/j.jallcom.2008.01.053

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Keywords:

Materials science Thin film Doping Sputtering Ceramic Electrical resistivity and conductivity Zinc Sputter deposition Aluminium Dispersant Viscosity Mineralogy Composite material Chemical engineering Metallurgy Optoelectronics Nanotechnology Dispersion (optics) Optics Chemistry

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Properties of aluminum doped zinc oxide materials and sputtering thin films

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