Micromechanical Characterization of Dielectric Thin Films

J. M. Grow

doi:10.1557/proc-308-601

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Micromechanical Characterization of Dielectric Thin Films

J. M. Grow

Year: 1993 Journal: MRS Proceedings Vol: 308 Publisher: Cambridge University Press

DOI: 10.1557/proc-308-601

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Keywords:

Materials science Nanoindenter Thin film Composite material Silicon Silicon carbide Dielectric Chemical vapor deposition Modulus Silicon oxide Silicon nitride Silicon dioxide Elastic modulus Metallurgy Nanotechnology Optoelectronics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Micromechanical Characterization of Dielectric Thin Films

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