Influence of substrate temperature on mechanical, optical and electrical properties of ZnO:Al films

Rui‐Tao Wen; Laisen Wang; Xuan Wang; Guanghui Yue; Yuanzhi Chen; Dong‐Liang Peng

doi:10.1016/j.jallcom.2010.08.034

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Influence of substrate temperature on mechanical, optical and electrical properties of ZnO:Al films

Rui‐Tao Wen Laisen Wang Xuan Wang Guanghui Yue Yuanzhi Chen Dong‐Liang Peng

Year: 2010 Journal: Journal of Alloys and Compounds Vol: 508 (2)Pages: 370-374 Publisher: Elsevier BV

DOI: 10.1016/j.jallcom.2010.08.034

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Keywords:

Materials science Wafer Scanning electron microscope Substrate (aquarium) Sputter deposition Electrical resistivity and conductivity Doping Ceramic Composite material Silicon Thin film Zinc Sputtering Optoelectronics Metallurgy Nanotechnology

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Influence of substrate temperature on mechanical, optical and electrical properties of ZnO:Al films

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