JOURNAL ARTICLE

Influence of substrate temperature on mechanical, optical and electrical properties of ZnO:Al films

Rui‐Tao WenLaisen WangXuan WangGuanghui YueYuanzhi ChenDong‐Liang Peng

Year: 2010 Journal:   Journal of Alloys and Compounds Vol: 508 (2)Pages: 370-374   Publisher: Elsevier BV
Keywords:
Materials science Wafer Scanning electron microscope Substrate (aquarium) Sputter deposition Electrical resistivity and conductivity Doping Ceramic Composite material Silicon Thin film Zinc Sputtering Optoelectronics Metallurgy Nanotechnology

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4.05
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19
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0.95
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Citation History

Topics

ZnO doping and properties
Physical Sciences →  Materials Science →  Materials Chemistry
Ga2O3 and related materials
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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