&lt;title&gt;Phase shifting interferometry using correlation&lt;/title&gt;

Adriana Nava-Vega; Luis Salas; Esteban Luna-Aguilar; Alejandro Cornejo-Rodrı́guez

doi:10.1117/12.591665

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<title>Phase shifting interferometry using correlation</title>

Adriana Nava-Vega Luis Salas Esteban Luna-Aguilar Alejandro Cornejo-Rodrı́guez

Year: 2004 Journal: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Pages: 602-605 Publisher: SPIE

DOI: 10.1117/12.591665

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Abstract

We present a new algorithm that applies the correlation functions to phase shifting interferometry to recover the phase of a test surface. In this work we make numerical simulations to test the algorithm and the results are verified with real interferograms. The correlation algorithm recovers the phase value with 5% accuracy.

Keywords:

Interferometry Phase (matter) Computer science Correlation Algorithm Phase correlation Optics Physics Mathematics Fourier transform Geometry

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Optical measurement and interference techniques

Physical Sciences → Computer Science → Computer Vision and Pattern Recognition

Advanced Measurement and Metrology Techniques

Physical Sciences → Engineering → Mechanical Engineering

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

<title>Phase shifting interferometry using correlation</title>

Abstract

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