Ferroelectric mesoscopic structures by room-temperature PLD

Abstract

Usually ferroelectric thin films are deposited by pulsed laser deposition (PLD) at elevated substrate temperatures, in order to obtain a good crystalline quality. Here we report the fabrication of ferroelectric BaTiO3 and BiFeO3 structures by room-temperature PLD combined with post-deposition annealing, and their ferroelectric characterization. A method to control the position of the deposited structures is also presented.