Development of palladium-based hydrogen thin film sensor using silicon oxide substrate

Masoud Jamshidi; Khaled Ali Alshaltami; F. Chaffar Akkari; Jonathan P. Wright

doi:10.1007/s12648-012-0241-9

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Development of palladium-based hydrogen thin film sensor using silicon oxide substrate

Masoud Jamshidi Khaled Ali Alshaltami F. Chaffar Akkari Jonathan P. Wright

Year: 2013 Journal: Indian Journal of Physics Vol: 87 (6)Pages: 511-515 Publisher: Springer Science+Business Media

DOI: 10.1007/s12648-012-0241-9

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Keywords:

Materials science Thin film Palladium Hydrogen sensor Substrate (aquarium) Hydrogen Evaporation Fabrication Oxide Silicon Vacuum evaporation Yttrium Optoelectronics Electrical resistance and conductance Nanotechnology Composite material Metallurgy Catalysis

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Analytical Chemistry and Sensors

Physical Sciences → Chemical Engineering → Bioengineering

Advanced Chemical Sensor Technologies

Physical Sciences → Engineering → Biomedical Engineering

Development of palladium-based hydrogen thin film sensor using silicon oxide substrate

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