Thin-film NiCr resistor

Abstract

Reactively evaporated NiCr resistors have been produced with slightly negative temperature coefficients of resistance. Evidence from the transmission electron microscope and Auger electron microprobe show these to be cermet structures with multiple conduction mechanisms. A theoretical model initially proposed by Neugebauer for discontinuous films is applied to these thin-film structures and expanded for the multiple conduction mechanisms and effect of expansion mismatch between the substrate and film.