Out-of-plane magnetic actuators with electroplated permalloy for fluid dynamics control

Chang Liu; T. Tsao; Gwo‐Bin Lee; Jeremy T.S Leu; Yong W Yi; Yu‐Chong Tai; Chih‐Ming Ho

doi:10.1016/s0924-4247(99)00238-1

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Out-of-plane magnetic actuators with electroplated permalloy for fluid dynamics control

Chang Liu T. Tsao Gwo‐Bin Lee Jeremy T.S Leu Yong W Yi Yu‐Chong Tai Chih‐Ming Ho

Year: 1999 Journal: Sensors and Actuators A Physical Vol: 78 (2-3)Pages: 190-197 Publisher: Elsevier BV

DOI: 10.1016/s0924-4247(99)00238-1

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Keywords:

Permalloy Actuator Cantilever Materials science Displacement (psychology) Magnetic field Electroplating Surface micromachining Fluidics Perpendicular Magnetization Electrical engineering Composite material Fabrication Physics Engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Magnetic Field Sensors Techniques

Physical Sciences → Engineering → Electrical and Electronic Engineering

Plasma and Flow Control in Aerodynamics

Physical Sciences → Engineering → Aerospace Engineering

Out-of-plane magnetic actuators with electroplated permalloy for fluid dynamics control

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