High-performance micromachined unimorph actuators based on electrostrictive poly(vinylidene fluoride–trifluoroethylene) copolymer

Abstract

We report on the performance of micromachined unimorph actuators [(polymer micromachined actuator PMAT)] based on the electrostrictive poly(vinylidene fluoride–trifluoroethylene) [P(VDF–TrFE)] copolymer. Because of the high electrostrictive strain and high elastic energy density (∼1 J/cm3) of the active polymer [the electrostrictive P(VDF–TrFE)], the PMAT exhibits a very high stroke level with high load capability and high displacement voltage ratio. In addition, the experimental data also demonstrate that the PMAT is capable of operating over a broad frequency range (>100 kHz). The PMAT performance was modeled and the agreement between the modeling results and experimental data confirms that the response of the PMAT indeed follows the design parameters.