Low g Inertial Sensor based on High Aspect Ratio MEMS

Matthieu Reze; J.M. Hammond

doi:10.1007/3-540-27463-4_34

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Low g Inertial Sensor based on High Aspect Ratio MEMS

Matthieu Reze J.M. Hammond

Year: 2005 Pages: 459-471

DOI: 10.1007/3-540-27463-4_34

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Keywords:

Microelectromechanical systems Inertial measurement unit Inertial frame of reference Materials science Aerospace engineering Engineering Physics Optoelectronics Classical mechanics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Geophysics and Sensor Technology

Physical Sciences → Engineering → Ocean Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Low g Inertial Sensor based on High Aspect Ratio MEMS

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