Fabrication of photonic crystal structures in polymer waveguide material

Uwe Huebner; R. Boucher; W. Morgenroth; Markus A. Schmidt; M. Eich

doi:10.1016/j.mee.2006.01.028

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Fabrication of photonic crystal structures in polymer waveguide material

Uwe Huebner R. Boucher W. Morgenroth Markus A. Schmidt M. Eich

Year: 2006 Journal: Microelectronic Engineering Vol: 83 (4-9)Pages: 1138-1141 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2006.01.028

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Keywords:

Materials science Waveguide Fabrication Refractive index Photonic crystal Optoelectronics Polymer Substrate (aquarium) Optics Electron-beam lithography Photonics Resist Nanotechnology Composite material

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Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Fabrication of photonic crystal structures in polymer waveguide material

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