Negative Photoconductivity in Polycrystalline Silicon Films Doped with Phosphorus

Masashi Nakabayashi; H. Ohyama; Eddy Simoen; M. Ikegami; Cor Claeys; K. Kobayashi; M. Yoneoka; Y. Takami; H. Sunaga; H. Takizawa; K. Miyahara

doi:10.4028/www.scientific.net/ssp.78-79.225

JOURNAL ARTICLE

Negative Photoconductivity in Polycrystalline Silicon Films Doped with Phosphorus

Masashi Nakabayashi H. Ohyama Eddy Simoen M. Ikegami Cor Claeys K. Kobayashi M. Yoneoka Y. Takami H. Sunaga H. Takizawa K. Miyahara

Year: 2001 Journal: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 78-79 Pages: 225-230 Publisher: Scientific.net

DOI: 10.4028/www.scientific.net/ssp.78-79.225

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Keywords:

Materials science Photoconductivity Polycrystalline silicon Doping Crystallite Silicon Phosphorus Optoelectronics Engineering physics Nanotechnology Metallurgy Thin-film transistor Layer (electronics)

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Silicon and Solar Cell Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Semiconductor materials and interfaces

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Negative Photoconductivity in Polycrystalline Silicon Films Doped with Phosphorus

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